Sensor confocal chromatic terbaru dari Micro-Epsilon dirancang untuk pengukuran jarak dan ketebalan dengan akurasi tinggi di lingkungan ekstrem. Sensor ini mampu bekerja pada suhu hingga 200 °C, serta tetap stabil secara termal. Dengan desain kompak dan kompatibilitas vakum (hingga ultra-high vacuum/UHV), sensor ini sangat cocok untuk aplikasi presisi tinggi seperti mesin presisi dan industri semikonduktor.
| Parameter | IFS2407-0,8HT/VAC | IFS2407-2HT/VAC | IFS2407/90-2HT/VAC | IFS2407-4HT/VAC | IFS2407/90-4HT/VAC |
|---|---|---|---|---|---|
| Measuring range | 0.8 mm | 2 mm | 2 mm | 4 mm | 4 mm |
| Start of measuring range | approx. 5.85 mm | 14.5 mm | 8 mm | 14.5 mm | 8 mm |
| Resolution (Static) | < 6 nm | < 10 nm | < 10 nm | < 24 nm | < 24 nm |
| Resolution (Dynamic) | < 45 nm | < 90 nm | < 90 nm | < 180 nm | < 180 nm |
| Linearity (Displacement & Distance) | < ±0.16 µm | < ±0.4 µm | < ±0.4 µm | < ±0.8 µm | < ±0.8 µm |
| Linearity (Thickness) | < ±0.35 µm | < ±0.88 µm | < ±0.88 µm | < ±1.76 µm | < ±1.76 µm |
| Temperature stability | <0.015 % FSO/K | <0.005 % FSO/K | <0.005 % FSO/K | <0.01 % FSO/K | <0.01 % FSO/K |
| Light spot diameter | 11 µm | 19 µm | 19 µm | 29 µm | 29 µm |
| Maximum measuring angle | ±30° | ±12° | ±12° | ±8° | ±8° |
| Numerical aperture (NA) | 0.50 | 0.28 | 0.28 | 0.19 | 0.19 |
| Min. target thickness | 0.04 mm | 0.1 mm | 0.1 mm | 0.2 mm | 0.2 mm |
| Target material | Reflective, diffuse as well as transparent surfaces (e.g. glass) | ||||
| Connection | Pluggable optical fiber via FC socket | ||||
| Mounting | Clamping / screw connection via four mounting holes M2x0.4 | ||||
| Temperature range (Storage) | -20 … +200 °C | ||||
| Temperature range (Operation) | +5 … +200 °C | ||||
| Shock | 15 g / 6 ms in XY axis, 1000 shocks each | ||||
| Vibration | 2 g / 20 … 500 Hz in XY axis | ||||
| Protection class | IP40 (vacuum compatible) | ||||
| Material | Stainless steel housing, glass lenses | ||||
| Weight | approx. 40 g | approx. 40 g | approx. 50 g | approx. 40 g | approx. 50 g |
