IMS5600-DS adalah interferometer absolut berperforma tinggi yang dirancang untuk pengukuran jarak dengan presisi maksimum, khususnya di lingkungan cleanroom dan vakum. Dengan resolusi hingga sub-nanometer serta sistem evaluasi cerdas, sensor ini ideal untuk aplikasi dengan tuntutan akurasi sangat tinggi seperti industri elektronik dan semikonduktor.
| Model | IMS5600-DS | IMS5600MP-DS |
|---|---|---|
| Resolution | < 30 pm | |
| Measuring rate | continuously adjustable from 100 Hz to 6 kHz | |
| Linearity | < ±10 nm | < ±10 nm for the first distance; < ±100 nm for each further distance |
| Temperature stability | temperature compensated, stability < 10 ppm between +15 … +35 °C | |
| Multi-peak measurement | – | up to 13 layers |
| Light source | NIR-SLED, narrow wavelength band at approx. 840 nm; pilot laser: laser LED, wavelength 635 nm |
|
| Laser class | Class 1 according to DIN EN 60825-1: 2015-07; Pilot laser: Class 1, power (< 0.2 mW) |
|
| Supply voltage | 24 VDC ± 15 % | |
| Power consumption | approx. 10 W (24 V) | |
| Signal input | Sync in, trigger in, 2x encoders (A+, A-, B+, B-, index) | |
| Digital interface | Ethernet / EtherCAT / RS422 / PROFINET / EtherNet/IP | |
| Analog output | 4 … 20 mA / 0 … 10 V (16 bit D/A converter) | |
| Switching output | Error1-Out, Error2-Out | |
| Digital output | sync out | |
| Connection (Optical) | Pluggable fiber optic cable via E2000 socket (controller); see accessories for cable lengths; bending radius: static 30 mm, dynamic 40 mm |
|
| Connection (Electrical) | 3-pin supply terminal strip; encoder connection (15-pin, HD-sub socket); RS422 connection socket (9-pin, Sub-D); max. cable length 30 m; RJ45 socket for Ethernet (out) / EtherCAT (in/out) (max. 100 m) |
|
| Mounting | Sensor via radial clamping or mounting adapter; controller free-standing or top-hat rail mounting |
|
| Temperature range (Storage) | -20 … +70 °C | |
| Temperature range (Operation) | +15 … +35 °C | |
| Shock | 15 g / 6 ms in XY axis, 1000 shocks each | |
| Vibration | 2 g / 20 … 500 Hz in XY axis, 10 cycles each | |
| Protection class | IP40 | |
| Material | Aluminum housing, passive cooling | |
| Control and indicator elements | Multifunction button: two adjustable functions and reset to factory settings after 10 s; web interface for setup: selectable presets, freely selectable averaging, data reduction, setup management; 6 x color LEDs for intensity, range, SLED, pilot laser, status and power; pilot laser can be switched on for sensor alignment |
|
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