IMS5200-TH adalah white light interferometer inovatif dari Micro-Epsilon yang dirancang untuk pengukuran ketebalan lapisan tipis secara cepat dan akurat. Dengan kemampuan mengukur layer transparan mulai dari 1 µm hingga 100 µm serta kecepatan hingga 24 kHz, sensor ini ideal untuk aplikasi industri, cleanroom, hingga lingkungan vakum.
| Model | IMS5200-TH26 | IMS5200MP-TH26 | |
|---|---|---|---|
| Working distance | 26 mm ±2 mm | ||
| Measuring range | Thickness | 1 µm … 100 µm | |
| Resolution | < 1 nm | ||
| Measuring rate | 100 Hz … 24 kHz (adjustable) | ||
| Linearity | < ±100 nm | ||
| Temperature stability | Sensor | Valid over entire temperature range | |
| Multi-peak measurement | 1 layer | 5 layers | |
| Light source | Internal white LED | ||
| Light spot diameter | 55 µm | ||
| Measuring angle | ±4° | ||
| Supply voltage | 24 VDC ±15% | ||
| Power consumption | approx. 10 W | ||
| Signal input | Sync in, trigger in, encoders (A+, A-, B+, B-, Index) | ||
| Digital interface | Ethernet / EtherCAT / RS422 / PROFINET | ||
| Analog output | 4–20 mA / 0–10 V (16 bit) | ||
| Switching output | Error1-Out, Error2-Out | ||
| Digital output | Sync out | ||
| Connection | Optical | Pluggable optical fiber via E2000 socket | |
| Electrical | RS422, Ethernet, encoder, I/O terminal strip | ||
| Mounting | Sensor | Radial clamping | |
| Controller | DIN rail mounting | ||
| Temperature range | Storage | -20°C … +70°C | |
| Operation | +10°C … +50°C | ||
| Shock | 15 g / 6 ms | ||
| Vibration | 2g / 20 … 500 Hz | ||
| Protection class | Sensor | IP65 (front) | |
| Controller | IP40 | ||
| Material | Sensor | Stainless steel | |
| Controller | Aluminum housing | ||
