Jual InterferoMETER 5420

OVERVIEW

IMS5420-TH adalah interferometer absolut yang dirancang khusus untuk pengukuran ketebalan wafer silikon secara stabil dalam proses inline industri. Sensor ini mampu mengukur wafer monocrystalline silicon, silicon carbide, dan material sejenis dengan presisi tinggi, berkat teknologi SLED broadband pada panjang gelombang ~1100 nm.

FITUR

Pengukuran ketebalan wafer silikon dengan akurasi tinggi (nanometer-level)
Cocok untuk wafer undoped, doped, hingga highly doped
Measuring range hingga ±1.05 mm untuk wafer
Mampu mengukur air gap hingga 4 mm
Teknologi SLED broadband (≈1100 nm) untuk material transparan tertentu
Stabil untuk proses inline (real-time production)
Rasio harga-performa sangat baik untuk aplikasi industri semikonduktor
Cocok untuk silicon wafers, silicon carbide, dan material serupa

SPESIFIKASI

Model	IMS5420-TH	IMS5420MP-TH	IMS5420IP67-TH	IMS5420IP67MP-TH
Resolution	< 1 nm
Measuring rate	continuously adjustable from 100 Hz to 6 kHz
Linearity	< ±100 nm	< ±100 nm with one layer < ±200 nm for other layers	< ±100 nm	< ±100 nm with one layer < ±200 nm for other layers
Temperature stability	temperature compensated, stability < ±50 ppm between +10 … +50 °C
Multi-peak measurement	1 layer	up to 5 layers	1 layer	up to 5 layers
Light source	NIR-SLED, narrow wavelength band at approx. 1100 nm; pilot laser: laser LED, wavelength 635 nm	NIR-SLED, narrow wavelength band at approx. 1100 nm
Laser class	Class 1 according to DIN EN 60825-1: 2022-07; Pilot laser: Class 1, power (< 0.2 mW)	Class 1 in accordance with DIN EN 60825-1: 2022-07
Supply voltage	24 VDC ± 15 %
Power consumption	approx. 10 W (24 V)
Signal input	Sync in, trigger in, 2x encoders (A+, A-, B+, B-, index)
Digital interface	Ethernet / EtherCAT / PROFINET / Ethernet/IP	Ethernet / RS422 / PROFINET / Ethernet/IP
Analog output	4 … 20 mA / 0 … 10 V (16 bit DA converter)	–
Switching output	Error1-Out, Error2-Out	–
Mounting	Free-standing, DIN rail mounting	Through bores
Temperature range (Storage)	-20 … +70 °C
Temperature range (Operation)	+10 … +50 °C
Shock	15 g / 6 ms in XY axis, 1000 shocks each
Vibration	2 g / 20 … 500 Hz in XY axis, 10 cycles each
Protection class	IP40	IP67
Material	Aluminum housing, passive cooling	Stainless steel housing

Model

IMS5420-TH

IMS5420MP-TH

IMS5420IP67-TH

IMS5420IP67MP-TH

Resolution

< 1 nm

Measuring rate

continuously adjustable from 100 Hz to 6 kHz

Linearity

< ±100 nm

< ±100 nm with one layer
< ±200 nm for other layers

< ±100 nm

< ±100 nm with one layer
< ±200 nm for other layers

Temperature stability

temperature compensated, stability < ±50 ppm between +10 … +50 °C

Multi-peak measurement

1 layer

up to 5 layers

1 layer

up to 5 layers

Light source

NIR-SLED, narrow wavelength band at approx. 1100 nm;
pilot laser: laser LED, wavelength 635 nm

NIR-SLED, narrow wavelength band at approx. 1100 nm

Laser class

Class 1 according to DIN EN 60825-1: 2022-07;
Pilot laser: Class 1, power (< 0.2 mW)

Class 1 in accordance with DIN EN 60825-1: 2022-07

Supply voltage

24 VDC ± 15 %

Power consumption

approx. 10 W (24 V)

Signal input

Sync in, trigger in, 2x encoders (A+, A-, B+, B-, index)

Digital interface

Ethernet / EtherCAT / PROFINET / Ethernet/IP

Ethernet / RS422 / PROFINET / Ethernet/IP

Analog output

4 … 20 mA / 0 … 10 V (16 bit DA converter)

–

Switching output

Error1-Out, Error2-Out

–

Mounting

Free-standing, DIN rail mounting

Through bores

Temperature range (Storage)

-20 … +70 °C

Temperature range (Operation)

+10 … +50 °C

Shock

15 g / 6 ms in XY axis, 1000 shocks each

Vibration

2 g / 20 … 500 Hz in XY axis, 10 cycles each

Protection class

IP40

IP67

Material

Aluminum housing, passive cooling

Stainless steel housing

InterferoMETER 5420

OVERVIEW

FITUR

SPESIFIKASI

Related products

InduSENSOR LDR

ThicknessSENSOR

EddyNCDT 3020

EddyNCDT 3005