IMS5420-TH adalah interferometer absolut yang dirancang khusus untuk pengukuran ketebalan wafer silikon secara stabil dalam proses inline industri. Sensor ini mampu mengukur wafer monocrystalline silicon, silicon carbide, dan material sejenis dengan presisi tinggi, berkat teknologi SLED broadband pada panjang gelombang ~1100 nm.
| Model | IMS5420-TH | IMS5420MP-TH | IMS5420IP67-TH | IMS5420IP67MP-TH |
|---|---|---|---|---|
| Resolution | < 1 nm | |||
| Measuring rate | continuously adjustable from 100 Hz to 6 kHz | |||
| Linearity | < ±100 nm | < ±100 nm with one layer < ±200 nm for other layers |
< ±100 nm | < ±100 nm with one layer < ±200 nm for other layers |
| Temperature stability | temperature compensated, stability < ±50 ppm between +10 … +50 °C | |||
| Multi-peak measurement | 1 layer | up to 5 layers | 1 layer | up to 5 layers |
| Light source | NIR-SLED, narrow wavelength band at approx. 1100 nm; pilot laser: laser LED, wavelength 635 nm |
NIR-SLED, narrow wavelength band at approx. 1100 nm | ||
| Laser class | Class 1 according to DIN EN 60825-1: 2022-07; Pilot laser: Class 1, power (< 0.2 mW) |
Class 1 in accordance with DIN EN 60825-1: 2022-07 | ||
| Supply voltage | 24 VDC ± 15 % | |||
| Power consumption | approx. 10 W (24 V) | |||
| Signal input | Sync in, trigger in, 2x encoders (A+, A-, B+, B-, index) | |||
| Digital interface | Ethernet / EtherCAT / PROFINET / Ethernet/IP | Ethernet / RS422 / PROFINET / Ethernet/IP | ||
| Analog output | 4 … 20 mA / 0 … 10 V (16 bit DA converter) | – | ||
| Switching output | Error1-Out, Error2-Out | – | ||
| Mounting | Free-standing, DIN rail mounting | Through bores | ||
| Temperature range (Storage) | -20 … +70 °C | |||
| Temperature range (Operation) | +10 … +50 °C | |||
| Shock | 15 g / 6 ms in XY axis, 1000 shocks each | |||
| Vibration | 2 g / 20 … 500 Hz in XY axis, 10 cycles each | |||
| Protection class | IP40 | IP67 | ||
| Material | Aluminum housing, passive cooling | Stainless steel housing | ||
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